TEL Tokyo Electron 3D81-000038-V2印刷電路板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 3D81-000038-V2 印刷電路板（Printed Circuit Board，PCB） 是一款用于TEL半導(dǎo)體制造設(shè)備中的專用電子控制模塊，通常用于實(shí)現(xiàn)信號中繼、系統(tǒng)邏輯控制、接口處理或功能電路集成。該電路板作為設(shè)備系統(tǒng)中的核心組件之一，承擔(dān)著特定子系統(tǒng)的信號連接與邏輯執(zhí)行功能。
一、基本信息
產(chǎn)品名稱：印刷電路板 / 控制電路板
產(chǎn)品型號：3D81-000038-V2
制造商：Tokyo Electron Ltd.（TEL）
功能類型：控制邏輯電路板 / 接口轉(zhuǎn)換板 / 中繼處理板（具體取決于設(shè)備型號）
典型安裝位置：設(shè)備主控機(jī)架、電控箱、IO接口系統(tǒng)中
二、主要功能（視具體配置而定）
信號中繼與分配
連接主控系統(tǒng)與子系統(tǒng)（如傳感器、執(zhí)行器、閥控模塊等），實(shí)現(xiàn)信號中轉(zhuǎn)和邏輯判斷。
接口協(xié)議處理
執(zhí)行信號電平匹配、通信協(xié)議轉(zhuǎn)換（如TTL ? RS-232/485）等功能。
系統(tǒng)邏輯控制
集成專用電路（如微控制器、邏輯門陣列、放大器等），用于執(zhí)行特定工藝步驟的控制邏輯。
保護(hù)與隔離功能
實(shí)現(xiàn)電源、電信號的隔離與保護(hù)，如ESD防護(hù)、電源濾波等。
三、典型應(yīng)用設(shè)備
該P(yáng)CB模塊常應(yīng)用于以下TEL設(shè)備中，發(fā)揮中控輔助作用：
| 設(shè)備類型 | 應(yīng)用說明 |
|---|---|
| Etcher（刻蝕設(shè)備） | 處理射頻控制信號、閥門控制、等離子源中繼邏輯 |
| CVD/ALD系統(tǒng) | 管理溫控反饋信號、化學(xué)氣體切換控制 |
| Track設(shè)備（涂膠顯影） | 控制顯影單元、烘烤平臺、液體閥組件 |
| Transfer Module（搬運(yùn)系統(tǒng)） | 處理機(jī)械手、吸盤、托盤狀態(tài)信號等 |
英文資料：
TEL Tokyo Electron 3D81-000038-V2 Printed Circuit Board (PCB) is a specialized electronic control module used in TEL semiconductor manufacturing equipment, typically for signal relay, system logic control, interface processing, or functional circuit integration. As one of the core components in the device system, this circuit board is responsible for signal connection and logic execution functions of specific subsystems.
1、 Basic Information
Product Name: Printed Circuit Board/Control Circuit Board
Product model: 3D81-000038-V2
Manufacturer: Tokyo Electron Ltd. (TEL)
Function type: Control logic circuit board/interface conversion board/relay processing board (depending on the device model)
Typical installation locations: equipment main control rack, electrical control box, IO interface system
2、 Main functions (depending on specific configuration)
Signal Relay and Distribution
Connect the main control system with subsystems (such as sensors, actuators, valve control modules, etc.) to achieve signal relay and logical judgment.
Interface protocol processing
Perform signal level matching and communication protocol conversion (such as TTL) ? Functions such as RS-232/485.
System logic control
Integrated specialized circuits (such as microcontrollers, logic gate arrays, amplifiers, etc.) are used to execute control logic for specific process steps.
Protection and isolation function
Implement isolation and protection of power and electrical signals, such as ESD protection, power filtering, etc.
3、 Typical application devices
This PCB module is commonly used in the following TEL devices to play a central control auxiliary role:
Equipment type application instructions
Etcher (etching equipment) processes RF control signals, valve control, and plasma source relay logic
CVD/ALD system management temperature control feedback signal, chemical gas switching control
Track equipment (adhesive development) controls the development unit, baking platform, and liquid valve components
Transfer Module (handling system) processes status signals of robotic arms, suction cups, trays, etc
2.產(chǎn) 品 展 示
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