TEL Tokyo Electron 381-648286-12數(shù)字量輸入卡件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 381-648286-12 數(shù)字量輸入卡件（Digital Input Card） 是一款專用于TEL半導(dǎo)體制造設(shè)備中的數(shù)字信號采集模塊，用于接收和處理來自設(shè)備各處的開關(guān)量（ON/OFF）信號，實現(xiàn)設(shè)備運行狀態(tài)的檢測、過程聯(lián)鎖、報警觸發(fā)等控制任務(wù)。
一、基本信息
產(chǎn)品名稱：數(shù)字量輸入卡件（DI卡）
產(chǎn)品型號：381-648286-12
制造商：Tokyo Electron Ltd.（TEL）
板卡類型：數(shù)字輸入（DI）模塊
典型位置：設(shè)備控制機柜、輸入/輸出接口框架、電氣分區(qū)模塊內(nèi)
二、主要功能
開關(guān)信號采集（Digital Input）
接收來自按鈕、行程開關(guān)、接近傳感器、限位器、安全門鎖等的狀態(tài)信號（如 0/24V DC）。
判斷設(shè)備是否達到指定工藝狀態(tài)或安全條件。
狀態(tài)反饋處理
將輸入信號反饋至主控系統(tǒng)（如PLC、嵌入式控制器），用于驅(qū)動邏輯判斷和自動流程。
支持多通道實時掃描，確保響應(yīng)速度。
聯(lián)鎖與報警觸發(fā)
輸入信號變化可觸發(fā)設(shè)備聯(lián)鎖邏輯或報警流程，保障運行安全。
系統(tǒng)互鎖機制
與數(shù)字輸出卡件、主控板協(xié)同，實現(xiàn)對設(shè)備動作的許可/禁止控制邏輯。
三、典型應(yīng)用領(lǐng)域
| 應(yīng)用系統(tǒng) | 采集信號類型 |
|---|---|
| 刻蝕設(shè)備（Etcher） | 反應(yīng)腔門狀態(tài)、真空開關(guān)、氣體切換完成反饋等 |
| CVD/ALD設(shè)備 | 加熱器狀態(tài)反饋、閥門到位信號、化學源保護觸發(fā)器 |
| 光刻/涂膠顯影（Track） | 晶圓在位檢測、旋轉(zhuǎn)平臺門鎖、液位報警等 |
| 搬運系統(tǒng) | 機械臂限位、夾持器狀態(tài)、托盤存在檢測等 |
英文資料：
TEL Tokyo Electron 381-648286-12 Digital Input Card is a digital signal acquisition module specifically designed for TEL semiconductor manufacturing equipment. It is used to receive and process ON/OFF signals from various parts of the equipment, and to achieve control tasks such as detecting equipment operating status, process interlocking, and alarm triggering.
1、 Basic Information
Product Name: Digital Input Card (DI Card)
Product model: 381-648286-12
Manufacturer: Tokyo Electron Ltd. (TEL)
Board type: Digital Input (DI) module
Typical locations: within equipment control cabinets, input/output interface frameworks, and electrical partition modules
2、 Main functions
Switch signal acquisition (Digital Input)
Receive status signals (such as 0/24V DC) from buttons, travel switches, proximity sensors, limiters, safety door locks, etc.
Determine whether the equipment has reached the specified process state or safety conditions.
Status feedback processing
Feedback the input signal to the main control system (such as PLC, embedded controller) for driving logic judgment and automatic processes.
Support multi-channel real-time scanning to ensure response speed.
Interlocking and alarm triggering
Changes in input signals can trigger equipment interlocking logic or alarm processes, ensuring safe operation.
System interlocking mechanism
Collaborate with digital output cards and the main control board to implement permission/prohibition control logic for device actions.
3、 Typical application areas
Application system collects signal types
Etcher reaction chamber door status, vacuum switch, gas switching completion feedback, etc
CVD/ALD equipment heater status feedback, valve in place signal, chemical source protection trigger
Photolithography/coating development (Track) wafer in-situ detection, rotating platform door lock, liquid level alarm, etc
Mechanical arm limit, gripper status, pallet presence detection, etc. in the handling system
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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4.其他英文產(chǎn)品
AMAT 0190-11415 Digital Input Module
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