ZYGO ZMI-4004 測量板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
ZYGO ZMI-4004 是一款高精度測量板，主要用于干涉測量系統(tǒng)中，以實(shí)現(xiàn)納米級(jí)的位移測量和精確定位。ZYGO 公司專注于超精密測量和光學(xué)干涉技術(shù)，其 ZMI 系列產(chǎn)品廣泛應(yīng)用于半導(dǎo)體制造、光學(xué)加工、計(jì)量和高精度運(yùn)動(dòng)控制等領(lǐng)域。
ZYGO ZMI-4004 測量板特點(diǎn)
高精度測量
- 采用激光干涉測量技術(shù)，可實(shí)現(xiàn)納米級(jí)甚至更高分辨率的位移測量。
- 適用于高精度定位和運(yùn)動(dòng)控制應(yīng)用。
多通道支持
- ZMI-4004 可能支持多個(gè)干涉測量通道，適用于復(fù)雜的多軸測量系統(tǒng)。
實(shí)時(shí)信號(hào)處理
- 具備高性能信號(hào)處理功能，可提供快速、準(zhǔn)確的測量反饋。
兼容性
- 兼容 ZYGO 的激光干涉儀系統(tǒng)，如 ZMI 系列干涉儀和光學(xué)測量系統(tǒng)。
應(yīng)用場景廣泛
- 半導(dǎo)體制造（晶圓對(duì)準(zhǔn)、光刻機(jī)精密運(yùn)動(dòng)控制）
- 精密機(jī)械加工（納米級(jí)定位）
- 科研實(shí)驗(yàn)（高分辨率位移測量）
- 航空航天精密測量系統(tǒng)
英文資料：
ZYGO ZMI-4004 is a high-precision measurement board mainly used in interferometric measurement systems to achieve nanoscale displacement measurement and precise positioning. ZYGO company focuses on ultra precision measurement and optical interference technology, and its ZMI series products are widely used in fields such as semiconductor manufacturing, optical processing, metrology, and high-precision motion control.
Characteristics of ZYGO ZMI-4004 measuring board
high precision measurement
By using laser interferometry measurement technology, displacement measurement at the nanometer level or even higher resolution can be achieved.
Suitable for high-precision positioning and motion control applications.
Multi channel support
ZMI-4004 may support multiple interferometric measurement channels and is suitable for complex multi axis measurement systems.
Real-time signal processing
Equipped with high-performance signal processing capabilities, it can provide fast and accurate measurement feedback.
compatibility
Compatible with ZYGO laser interferometer systems, such as ZMI series interferometers and optical measurement systems.
Widely applicable scenarios
Semiconductor manufacturing (wafer alignment, precision motion control of lithography machines)
Precision machining (nanometer level positioning)
Scientific research experiment (high-resolution displacement measurement)
Aerospace Precision Measurement System
2.產(chǎn) 品 展 示
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