Novellus Systems 02-00315-01接口模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Novellus Systems 02-00315-01 接口模塊 是一款用于半導(dǎo)體制造設(shè)備的關(guān)鍵電子組件，主要用于在控制系統(tǒng)與外部設(shè)備之間進(jìn)行信號和數(shù)據(jù)傳輸。該模塊通常用于 Novellus 的沉積設(shè)備（如 PECVD、SACVD、HDPCVD 或金屬沉積系統(tǒng)）中，起著“橋梁”作用。
一、基本信息
產(chǎn)品名稱：接口模塊（Interface Module）
型號：02-00315-01
制造商：Novellus Systems Inc.（已被 Lam Research 收購）
用途：連接主控制系統(tǒng)與外圍傳感器、執(zhí)行器、通信總線等，完成 I/O 映射和信號處理。
二、功能特點(diǎn)
I/O 接口管理：提供數(shù)字/模擬輸入輸出通道，允許設(shè)備控制器與外圍設(shè)備通信。
信號隔離：內(nèi)置隔離保護(hù)，防止靜電或電氣干擾影響核心控制邏輯。
模塊化設(shè)計(jì)：支持熱插拔或便捷更換，適用于多種 Novellus 工藝平臺。
數(shù)據(jù)中繼：可能作為中間節(jié)點(diǎn)與 PLC、計(jì)算機(jī)、傳感器、執(zhí)行機(jī)構(gòu)之間傳遞命令和反饋。
三、典型應(yīng)用設(shè)備
此類接口模塊多應(yīng)用于 Novellus Systems 的以下設(shè)備系列中：
Concept One/Two/Three 系列：廣泛用于 CVD 工藝。
Speed 系列系統(tǒng)：用于高通量沉積工藝。
ALTUS 系列：原子層沉積（ALD）設(shè)備。
英文資料：
The Novellus Systems 02-00315-01 interface module is a critical electronic component used in semiconductor manufacturing equipment, primarily for signal and data transmission between control systems and external devices. This module is typically used in Novellus deposition equipment such as PECVD, SACVD, HDPCVD, or metal deposition systems, serving as a "bridge".
1、 Basic Information
Product Name: Interface Module
Model: 02-00315-01
Manufacturer: Novellus Systems Inc. (acquired by Lam Research)
Purpose: To connect the main control system with peripheral sensors, actuators, communication buses, etc., and complete I/O mapping and signal processing.
2、 Functional Features
I/O interface management: Provides digital/analog input/output channels, allowing device controllers to communicate with peripheral devices.
Signal isolation: Built in isolation protection to prevent static electricity or electrical interference from affecting the core control logic.
Modular design: supports hot swapping or easy replacement, suitable for multiple Novellus process platforms.
Data relay: may act as an intermediate node to transmit commands and feedback between PLCs, computers, sensors, and actuators.
3、 Typical application devices
This type of interface module is commonly used in the following device series of Novellus Systems:
Concept One/Two/Tree series: widely used in CVD processes.
Speed series system: used for high-throughput deposition processes.
ALTUS series: Atomic Layer Deposition (ALD) equipment.
2.產(chǎn) 品 展 示
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